JPS60306A - 合成波長法による測距方法 - Google Patents

合成波長法による測距方法

Info

Publication number
JPS60306A
JPS60306A JP58108134A JP10813483A JPS60306A JP S60306 A JPS60306 A JP S60306A JP 58108134 A JP58108134 A JP 58108134A JP 10813483 A JP10813483 A JP 10813483A JP S60306 A JPS60306 A JP S60306A
Authority
JP
Japan
Prior art keywords
wavelength
laser
light
wavelengths
laser beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58108134A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0133761B2 (en]
Inventor
Koichi Matsumoto
弘一 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58108134A priority Critical patent/JPS60306A/ja
Publication of JPS60306A publication Critical patent/JPS60306A/ja
Publication of JPH0133761B2 publication Critical patent/JPH0133761B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58108134A 1983-06-16 1983-06-16 合成波長法による測距方法 Granted JPS60306A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58108134A JPS60306A (ja) 1983-06-16 1983-06-16 合成波長法による測距方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58108134A JPS60306A (ja) 1983-06-16 1983-06-16 合成波長法による測距方法

Publications (2)

Publication Number Publication Date
JPS60306A true JPS60306A (ja) 1985-01-05
JPH0133761B2 JPH0133761B2 (en]) 1989-07-14

Family

ID=14476789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58108134A Granted JPS60306A (ja) 1983-06-16 1983-06-16 合成波長法による測距方法

Country Status (1)

Country Link
JP (1) JPS60306A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247901A (ja) * 1985-04-25 1986-11-05 Agency Of Ind Science & Technol 干渉計における位相差検出方法
JPS62135703A (ja) * 1985-12-10 1987-06-18 Yokogawa Electric Corp 測長器
JPH01304303A (ja) * 1988-06-01 1989-12-07 Yokogawa Electric Corp 測長器
JPH0552540A (ja) * 1991-02-08 1993-03-02 Hughes Aircraft Co 干渉計レーザ表面粗さ計
CN1304814C (zh) * 2005-02-25 2007-03-14 清华大学 具有方向识别功能的自混合干涉HeNe激光位移传感器

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247901A (ja) * 1985-04-25 1986-11-05 Agency Of Ind Science & Technol 干渉計における位相差検出方法
JPS62135703A (ja) * 1985-12-10 1987-06-18 Yokogawa Electric Corp 測長器
JPH01304303A (ja) * 1988-06-01 1989-12-07 Yokogawa Electric Corp 測長器
JPH0552540A (ja) * 1991-02-08 1993-03-02 Hughes Aircraft Co 干渉計レーザ表面粗さ計
CN1304814C (zh) * 2005-02-25 2007-03-14 清华大学 具有方向识别功能的自混合干涉HeNe激光位移传感器

Also Published As

Publication number Publication date
JPH0133761B2 (en]) 1989-07-14

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